Chotest Laser Interferometer Measurement System SJ6000 Series

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Chotest Laser Interferometer Measurement System SJ6000 Series

Features

 


High Precision of Measurement

Resolution is up to nanoscale based on the technology of laser interference

With high-precision environmental compensation modules, influences on measuring result which result from temperature, atmospheric pressure, relative humidity, material temperature and other environmental factors are eliminated;

Ensure long-term frequency stability of laser by using the laser thermal frequency stabilization control system;

Design of separating interferoscope from host avoids heat distortion of interferoscope, which ensures the stability of interference optical path.

 

 


 


Whole Parameters Measurement

Measure linearity, angle, straightness, perpendicularity and other geometrical parameters

Test the linear positioning accuracy and repeated positioning accuracy of guide rails for CNC machine tools, coordinate measuring machines and other precision motion equipments;

Test the pitch angle, swing angle, perpendicularity and straightness of the guide rails, in addition it can calibrate axis of rotation of machine tools.

 


 

Error Compensation

According to compensation settings by user, the system automatically generates error compensation table for calibration of machine tools.

 


 


Dynamic Measurement

With functions of Dynamic measurements (displacement-time curve, velocity-time curve, acceleration-time curve), amplitude measurement and frequency analysis, it can analyze vibration test of machine tool, dynamic characteristics of ball screw, response characteristics of drive system, dynamic characteristics of guide rail and so on.

 


 

 


 

Technical Data

System parameters:

1. Measuring method: single frequency
2. Laser frequency accuracy: 0.05ppm
3. Dynamic capture rate: 50kHz
4. Warm-up time: about 6 min
5. Operating temperature: (0-40)°C
6. Environment temperature: (0-40)°C, humidity: 0-95%
7. Storage temperature: -20°C-70°C

 

Environmental sensors:

1. Atmospheric temperature sensor : ±0.1°C (0-40)°C, resolution: 0.01°C
2. Material temperature sensor: ±0.1°C (0-40)°C, resolution: 0.01°C
3. Atmospheric humidity sensor: ±5% (0-95%)
4. Atmospheric pressure sensor: ±0.1kPa (65~115)kPa

 

Linear measurement:

1. Measuring range: (0-80)m
2. Measuring accuracy: 0.5ppm (0-40)°C
3. Measuring resolution: 1nm
4. Maximum measuring speed: 4m/s

 

Angle measurement:

1. Axial range: (0-15)m
2. Measuring range: ±10°
3. Measuring accuracy: ±(0.02%R+0.1+0.024M)″ (R is indicating value, unit: ″; M is measured length in m)
4. Measuring resolution: 0.1″

 

Flatness measurement:

1. Axial range: (0-15) m
2. Flatness measuring range: ±1.5 mm
3. Measuring accuracy: ±(0.2%R+0.02M2) μm (R is indicating value in μm; M is measured length in meters)
4. Substrate size: 180mm adjustable, 360mm adjustable
5. Measuring resolution: 0.1μm

 

Straightness measurement:

Item Axis range Measuring range Accuracy Resolution
Short straightness (0.1-4)m ±3.0mm ±(0.5+0.25%R+0.15M2)μm 0.01μm
Long straightness (1-20)m ±3.0mm ±(5.0+2.5%R+0.015M2)μm 0.1μm
      Note: R is indicating value in μm; M is measured length in meters

 

Perpendicularity measurement:

Item Axis range Measuring range Accuracy Resolution
Short perpendicularity (0.1-3)m ±3/M  mm/m ±(2.5+0.25%R+0.8M)μm/m 0.01μm/m
Long  perpendicularity (1-15)m ±3/M  mm/m ±(2.5+2.5%R+0.08M)μm/m 0.1μm/m
      Note: R is test result of perpendicularity; M is measured length in meters

 

Rotary axis measurement:

1. Measuring range of angle: 0-360°
2. Max rotation speed: 10rpm
3. Pitch accuracy of precision turntable: ±1″
4. Resolution: 0.1″

 



 Inquiry - Chotest Laser Interferometer Measurement System SJ6000 Series

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